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표면 MEMS 기술을 이용한 고온 용량형 압력센서의 특성

서정환, 노상수, 김광호

Characteristics of Surface Micromachined Capacitive Pressure Sensors for High Temperature Applications

Jeong Hwan Seo, Sang Soo Noh, Kwang Ho Kim
J Electr Electron Mater 2010;23(4):317-322.
Published online: April 1, 2010
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Characteristics of Surface Micromachined Capacitive Pressure Sensors for High Temperature Applications
J Electr Electron Mater. 2010;23(4):317-322.   Published online April 1, 2010
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Characteristics of Surface Micromachined Capacitive Pressure Sensors for High Temperature Applications
J Electr Electron Mater. 2010;23(4):317-322.   Published online April 1, 2010
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