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"Static-SIMS"
Analysis and Reduction of Impurity Contamination Induced by Plasma Etching on Si Surface
J Korean Inst Electr Electron Mater Eng
2006;19(12):1078-1084.
Published online December 1, 2006
DOI:
https://doi.org/10.4313/JKEM.2006.19.12.1078
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