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Single head kinematics
WHERE t1.sid in(parameter_dbtbl_keyword '%Single head kinematics%') and t1.xml_status <> 99
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"Single head kinematics"
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Non-uniformity (1)
Oxide CMP (1)
Removal rate (1)
Single head kinematics (1)
Temperature (1)
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2008 (1)
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Hae Do Jeong (1)
Young Jin Kim (1)
Hyoung Jae Kim (1)
Boum Young Park (1)
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Oxide CMP (1)
Removal rate (1)
Single head kinematics (1)
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"Single head kinematics"
Effect of Temperature on Polishing Properties in Oxide CMP
Young Jin Kim, Boum Young Park, Hyoung Jae Kim, Hae Do Jeong
J Electr Electron Mater
2008;21(2):93-98.
Published online February 1, 2008
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