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SiOCH film
WHERE t1.sid in(parameter_dbtbl_keyword '%SiOCH film%') and t1.xml_status <> 99
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2D-correlation analysis (1)
BTMSM precursor (1)
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2008 (1)
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Chang Su Hwang (1)
Jong Wook Kim (1)
Hong Bae Kim (1)
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2D-correlation analysis (1)
BTMSM precursor (1)
C-V characteristics (1)
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"SiOCH film"
Properties of SiOCH Thin Film Dielectric constant by BTMSM/O2 Flow Rates
Jong Wook Kim, Chang Su Hwang, Hong Bae Kim
J Electr Electron Mater
2008;21(4):362-367.
Published online April 1, 2008
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