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Sacrificial oxidation
WHERE t1.sid in(parameter_dbtbl_keyword '%Sacrificial oxidation%') and t1.xml_status <> 99
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4H-SiC (1)
ICP (1)
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MOS (1)
Sacrificial oxidation (1)
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2004 (1)
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Sang Mo Gu (1)
Nam Gyu Jo (1)
Sang Gwon Lee (1)
Yong Deug U (1)
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Interface states (1)
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"Sacrificial oxidation"
Electrical Characterization of MOS (metal-oxide-semiconductor) Capacitors on Plasma Etch-damaged 4H-Silicon Carbide
Nam Gyu Jo, Sang Mo Gu, Yong Deug U, Sang Gwon Lee
J Korean Inst Electr Electron Mater Eng
2004;17(4):373-377.
Published online April 1, 2004
DOI:
https://doi.org/10.4313/JKEM.2004.17.4.373
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