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"Plasma enhanced vapor deposition"

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"Plasma enhanced vapor deposition"

Electrical Properties of Diamond-Like Carbon Thin Film synthesized by PECVD
Won Seok Choi, Mun Gi Park, Byung You Hong
J Electr Electron Mater 2008;21(11):973-976.   Published online November 1, 2008
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A Study on Tribological Properties of Diamond-Like Carbon Thin Film for the Application to Solid Lubricant of MEMS Devices
J Electr Electron Mater 2006;19(11):1010-1013.   Published online November 1, 2006
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Structural Variation of Diamond-Like Carbon Thin Film According to the Annealing Temperature
J Electr Electron Mater 2006;19(8):701-706.   Published online August 1, 2006
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A Study on Detailed Structural Variation of Diamond-Like Carbon Thin Film by a Novel Raman Mapping Method
J Electr Electron Mater 2006;19(7):618-623.   Published online July 1, 2006
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An Analysis of Tribological Properties of Metal Interlayered DLC Films Prepared by PECVD Method
J Electr Electron Mater 2006;19(7):631-635.   Published online July 1, 2006
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