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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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MEMS 소자의 고체윤활박막으로 활용하기 위한 다이아몬드상 카본 박막의 트라이볼로지 특성 분석

최원석, 홍병유

A Study on Tribological Properties of Diamond-Like Carbon Thin Film for the Application to Solid Lubricant of MEMS Devices

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J Electr Electron Mater 2006;19(11):1010-1013.
Published online: November 1, 2006
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A Study on Tribological Properties of Diamond-Like Carbon Thin Film for the Application to Solid Lubricant of MEMS Devices
J Electr Electron Mater. 2006;19(11):1010-1013.   Published online November 1, 2006
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
A Study on Tribological Properties of Diamond-Like Carbon Thin Film for the Application to Solid Lubricant of MEMS Devices
J Electr Electron Mater. 2006;19(11):1010-1013.   Published online November 1, 2006
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