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"Oxidizer"

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"Oxidizer"

A Study on Oxidizer Effects in Tungsten CMP
J Electr Electron Mater 2005;18(9):787-792.   Published online September 1, 2005
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Improvement of Chemical Mechanical Polishing (CMP) Performance of Nickel by Additions of Abrasive and Various Oxidizers
J Electr Electron Mater 2005;18(7):605-609.   Published online July 1, 2005
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Electrochemical Corrosion and Chemical Mechanical Polishing(CMP) Characteristics of Tungsten Film using Mixed Oxidizer
J Electr Electron Mater 2005;18(4):303-308.   Published online April 1, 2005
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Role of Oxidants for Metal CMP Applications
Yong Jin Seo, Sang Yong Kim, U Seon Lee
J Electr Electron Mater 2004;17(4):378-383.   Published online April 1, 2004
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Effects of Mixed Oxidizer on the W-CMP Characteristics
Chang Jun Park, Yong Jin Seo, Sang Yong Kim, U Seon Lee
J Electr Electron Mater 2003;16(12s):1181-1186.
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