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Nitrided oxide
WHERE t1.sid in(parameter_dbtbl_keyword '%Nitrided oxide%') and t1.xml_status <> 99
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Boron penetration (2)
Ac stress (1)
Fixed oxide charge (Qf) (1)
Hot-carrier-Induced degradation (1)
Interface trap charge (Qit) (1)
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2007 (1)
2004 (1)
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Sung Keun Chang (1)
Youn Jang Kim (1)
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Boron penetration (2)
Ac stress (1)
Fixed oxide charge (Qf) (1)
Hot-carrier-Induced degradation (1)
Interface trap charge (Qit) (1)
Nano CMOSFET (1)
NBTI (1)
Negative bias temperature instability (1)
Nitrided oxide (1)
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"Nitrided oxide"
Dependency of the Device Characteristics on Plasma Nitrided Oxide for Nano-scale PMOSFET
J Electr Electron Mater
2007;20(7):569-574.
Published online July 1, 2007
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Characteristics of AC Hot-carrier-induced Degradation in nMOS with NO-based Gate Dielectrics
Sung Keun Chang, Youn Jang Kim
J Electr Electron Mater
2004;17(6):586-591.
Published online June 1, 2004
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