Thin thermistor films of solutions with nickel and manganese oxides were prepared by metal-organic decomposition (MOD). The structural properties of the thin films were investigated as a function of annealing temperature. Field emission scanning electron microscope (FE-SEM) results indicated that the thin films had a thin thickness, smooth and dense surface. The crystallization temperature of 414.9℃ was confirmed from thermogavimetric-differential thermal analysis (TG-DTA)curve. A single phase of cubic spinel structure was obtained for the thin film annealed from 700℃ to 800℃,which was confirmed from the X-ray diffraction (XRD). From the selected area electron diffraction(SAED) in high resolution transmission electron microscope (HRTEM), the nano grains (2∼3 nm) of spinel phase with (311) and (222) planes were detected for the thin film annealed at 500℃, which could be applicable to read-out integrated circuit (ROIC) substrate of the uncooled microbolometer with low processing temperature.