A variable vacuum capacitor (VVC), which is a variable element, is used to match impedance in plasma that changes with various impedance values, and its use is expanding with the rapid growth of the semiconductor business. Since VVCs have to secure insulation performance and vary capacitance within a compact size, electrode design and manufacturing are very important; thus, various technologies such as part design and manufacturing technology and vacuum brazing technology are required. In this study, based on the model of an advanced foreign company that is widely used for impedance matching in the manufacture of semiconductors and displays, a VVC that can realize the same performance was developed. The electrode part was designed, the consistency was confirmed through analysis, and the precision of capacitance was improved by designing a cup-type electrode to secure the concentricity of the electrode. As a result of the evaluation, all requirements was satisfied. We believe that self-development will be possible if satisfactory responses are received through evaluation by VVC consumers in the future.

Epitaxial ZnO nanowires (NWs) were synthesized on sapphire (001) substrates using a hydrothermal process. The effects of the pH value of the precursor solution on the structural and optical properties of the resulting NWs was studied. The epitaxial relationship and the domain matching configuration between the sapphire (001) substrate and the as-grown ZnO NWs were determined using synchrotron X-ray diffraction measurements. The (002) plane of wurtzite ZnO NW grows in the surface normal direction parallel to the sapphire (001) direction. However, three types of in-plane domain matching configurations were observed, such as the on-position, 30°-rotated position, and ±8.5°-rotated position relative to the on-position, which might be attributed to inheriting the in-plane domain configuration of the ZnO seed layer.

We fabricated highly flexible Mn-doped SnO2 (MTO)/Ag/MTO/polydimethylsiloxane (PDMS)/MTO multilayer transparent conducting films. To reduce refractive-index mismatching of the MTO/Ag/MTO/polyethylene terephthalate (PET), index-matching layers were inserted between the oxide-metal-oxide-structured films and the PET substrate. The PDMS layer was deposited by spin-coating after adjusting the mixing ratio of PDMS and hexane. We investigated the effects of the index-matching layer on the color and reflectance differences with different PDMS dilution ratios. As the dilution ratio increased from 1:100 to 1:130, the color difference increased slightly, while the reflectance difference decreased from 0.62 to 0.32. The MTO/Ag/MTO/PDMS/MTO film showed a transmittance of 87.18~87.68% at 550 nm. The highest value of the Haacke figure of merit was 47.54×10^-3 Ω^-1 for the dilution ratio of 1:130.

To evaluate whether or not their product is in conformity with its drawing, today`s factories manufacturing rubber and/or plastic products use manual process. In manual conformity inspection process, a person decides conformity as comparing drawing to image of product with his eyes. The manual process is tedious and time-consuming in addition that it is impossible to automatically record various informations related to inspection. To solve such problems, this paper proposes automatic drawing conformity inspection system based on computer vision technologies such as image feature matching and bilinear interpolation. The test results show that proposed system is a lot faster when comparing with manual system.

Citations

• Design of High-speed Bilinear Interpolation for Real Time Video Using FPGA
  Seon-Jeong Hwang, Da-Been Lee, Sunghyun Park, Hong-Rak Kim
  Journal of the KNST.2023; 6(4): 494.     CrossRef

In this paper, matching characteristic of MIM (metal-insulator-metal) capacitor with Al2O3/HfO2/Al2O3 (AHA) structure is analyzed. The floating gate capacitance measurement technique (FGMT) was used for analysis of matching characteristic of the MIM capacitors in depth. It was shown that matching coefficient of AHA MIM capacitor is 0.331%㎛ which is appropriate for application to analog/RF integrated circuits. It was also shown that the matching coefficient has a more strong dependence on the width than length of MIM capacitor.

Citations

• Temperature Dependence of Matching Characteristics of MIM Capacitor
  Jae-Hyung Jang, Hyuk-Min Kwon, Ho-Young Kwak, Sung-Kyu Kwon, Seon-Man Hwang, Seung-Yong Sung, Jong-Kwan Shin, Hi-Deok Lee
  Journal of the Institute of Electronics Engineers of Korea.2013; 50(5): 61.     CrossRef

Dielectric Barrier Discharge (DBD) reactor with sinsodual AC type of power supply is very widely adopted for its compact size and effective discharging mechanism to generate high density of ozone radicals. However, at the aspect of design on power supply, its optimal switching conditions and topology is achieved by empirical test. Therefore, throughout this paper, it is proposed a design method of DBD power supply to guarantee a maximum ozone yield rate in accordance with DBD reactor modification and impedance variation when rapid gas discharging in the DBD reactor is proceeded.