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"Large-area uniform"

Large-area Uniform Deposition of Amorphous Hydrogenated Carbon Films using a Plasma CVD Method
Sang Min Yun, Sung Chae Yang
J Korean Inst Electr Electron Mater Eng 2009;22(5):411-414.   Published online May 1, 2009
DOI: https://doi.org/10.4313/JKEM.2009.22.5.411
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