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플라즈마 CVD 법을 이용한 대면적 균일한 비정질 탄소 막 증착

윤상민, 양성채

Large-area Uniform Deposition of Amorphous Hydrogenated Carbon Films using a Plasma CVD Method

Sang Min Yun, Sung Chae Yang
J Electr Electron Mater 2009;22(5):411-414.
Published online: May 1, 2009
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Large-area Uniform Deposition of Amorphous Hydrogenated Carbon Films using a Plasma CVD Method
J Electr Electron Mater. 2009;22(5):411-414.   Published online May 1, 2009
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
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Large-area Uniform Deposition of Amorphous Hydrogenated Carbon Films using a Plasma CVD Method
J Electr Electron Mater. 2009;22(5):411-414.   Published online May 1, 2009
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