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In-Line sputter
WHERE t1.sid in(parameter_dbtbl_keyword '%In-Line sputter%') and t1.xml_status <> 99
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ITO (1)
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Min Hyung Ahn (1)
Eui Sik Cho (1)
Sang Jik Kwon (1)
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"In-Line sputter"
Characteristics of ITO Thin Films Sputtered on Polycarbonate substrates at Various Pressures By In-Line Sputter
Min Hyung Ahn, Eui Sik Cho, Sang Jik Kwon
J Electr Electron Mater
2009;22(9):772-775.
Published online September 1, 2009
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