Skip to main navigation Skip to main content
  • KIEEME

J Electr Electron Mater : Journal of Electrical and Electronic Materials

OPEN ACCESS
Search
Advanced Search
ABOUT
BROWSE ARTICLES
EDITORIAL POLICIES
FOR CONTRIBUTORS

Page Path

1
results for

"ICP-RIE"

Keywords

Publication year

Authors

"ICP-RIE"

Improvement of Etch Rate and Profile by SF6, C4F8 and O2 Gas Modulation
Soon Il Kwon, Kea Joon Yang, Woo Chang Song, Dong Gun Lim
J Korean Inst Electr Electron Mater Eng 2008;21(4):305-310.   Published online April 1, 2008
DOI: https://doi.org/10.4313/JKEM.2008.21.4.305

Citations

Citations to this article as recorded by  
  • Hydrophobic Properties on RF-sputtered PTFE Films coated on UV-treated Glass Substrates
    Jin Woon Son, Hyon O Youn, Kang Bae, Sun Young Sohn, Hwa Min Kim
    Journal of Korean Institute of Electrical and Electronic Materials Engineers.2010; 23(1): 6.     CrossRef
  • 189 View
  • 1 Download
  • 1 Crossref
First First Prev Prev
Page of 1
Next Next Last Last