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"Horn"

Simulation of Ultrasonic Dry Cleaning for Semiconductor/display Device Application
J Korean Inst Electr Electron Mater Eng 2004;17(12):1259-1263.   Published online December 1, 2004
DOI: https://doi.org/10.4313/JKEM.2004.17.12.1259

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  • Comparison of particle removal efficiency between the physical cleaning methods in the fabrication of liquid crystal displays
    Chang-Beom Park, Seung-Jun Yi, In-Soung Chang
    Journal of the Korea Academia-Industrial cooperation Society.2010; 11(3): 795.     CrossRef
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