Simulation of Ultrasonic Dry Cleaning for Semiconductor/display Device Application

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반도체/디스플레이 소자용 초음파 건식세정 시뮬레이션 연구

윤의중, 이강원, 김철호, 이석태

Simulation of Ultrasonic Dry Cleaning for Semiconductor/display Device Application

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J Electr Electron Mater 2004;17(12):1259-1263.
Published online: December 1, 2004

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Keywords: Ultrasonic dry cleaning, Transducer, LCD, Semiconductor, Horn, Clean air

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Simulation of Ultrasonic Dry Cleaning for Semiconductor/display Device Application

J Electr Electron Mater. 2004;17(12):1259-1263. Published online December 1, 2004

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Simulation of Ultrasonic Dry Cleaning for Semiconductor/display Device Application

J Electr Electron Mater. 2004;17(12):1259-1263. Published online December 1, 2004

Articles

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반도체/디스플레이 소자용 초음파 건식세정 시뮬레이션 연구

Simulation of Ultrasonic Dry Cleaning for Semiconductor/display Device Application

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