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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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"HMDS"

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"HMDS"

Growth of Single Crystalline 3C-SiC Thin Films for High Power Devices by CVD
Gwiy Sang Chung, Jae Cheol Shim
J Electr Electron Mater 2010;23(2):98-102.   Published online February 1, 2010
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Growth of Polycrystalline 3C-SiC Thin Films using HMDS Single Precursor
J Electr Electron Mater 2007;20(2):156-161.   Published online February 1, 2007
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