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Gate Metal
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Ruthenium (1)
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2004 (1)
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Shin Nam Hong (1)
Young Sub Kang (1)
Chung Keun Lee (1)
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"Gate Metal"
Properties of Ru1Zr1 Alloy Gate Electrode for NMOS Devices
Chung Keun Lee, Young Sub Kang, Shin Nam Hong
J Electr Electron Mater
2004;17(6):602-607.
Published online June 1, 2004
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