Properties of Ru1Zr1 Alloy Gate Electrode for NMOS Devices

Chung Keun Lee; Young Sub Kang; Shin Nam Hong

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NMOS 소자에 대한 Ru1Zr1 합금 게이트 전극의 특성

이충근, 강영섭, 홍신남

Properties of Ru1Zr1 Alloy Gate Electrode for NMOS Devices

Chung Keun Lee, Young Sub Kang, Shin Nam Hong

J Electr Electron Mater 2004;17(6):602-607.
Published online: June 1, 2004

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Keywords: Work Function, Gate Metal, Thermal Stability, Ruthenium, Zirconium

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Properties of Ru1Zr1 Alloy Gate Electrode for NMOS Devices

J Electr Electron Mater. 2004;17(6):602-607. Published online June 1, 2004

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Properties of Ru1Zr1 Alloy Gate Electrode for NMOS Devices

J Electr Electron Mater. 2004;17(6):602-607. Published online June 1, 2004

Sintering Behavior of Borate-Based Glass Ceramic Solid Electrolytes for All-Solid Batteries

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NMOS 소자에 대한 Ru1Zr1 합금 게이트 전극의 특성

Properties of Ru1Zr1 Alloy Gate Electrode for NMOS Devices

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