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Film bulk acoustic resonator
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"Film bulk acoustic resonator"
Characteristics of ZnO Thin Films of FBAR using ALD and RE Magnetron Sputtering
J Korean Inst Electr Electron Mater Eng
2005;18(2):164-168.
Published online February 1, 2005
DOI:
https://doi.org/10.4313/JKEM.2005.18.2.164
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