In this paper, matching characteristic of MIM (metal-insulator-metal) capacitor with Al2O3/HfO2/Al2O3 (AHA) structure is analyzed. The floating gate capacitance measurement technique (FGMT) was used for analysis of matching characteristic of the MIM capacitors in depth. It was shown that matching coefficient of AHA MIM capacitor is 0.331%㎛ which is appropriate for application to analog/RF integrated circuits. It was also shown that the matching coefficient has a more strong dependence on the width than length of MIM capacitor.

Citations

• Temperature Dependence of Matching Characteristics of MIM Capacitor
  Jae-Hyung Jang, Hyuk-Min Kwon, Ho-Young Kwak, Sung-Kyu Kwon, Seon-Man Hwang, Seung-Yong Sung, Jong-Kwan Shin, Hi-Deok Lee
  Journal of the Institute of Electronics Engineers of Korea.2013; 50(5): 61.     CrossRef