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FFM
WHERE t1.sid in(parameter_dbtbl_keyword '%FFM%') and t1.xml_status <> 99
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"FFM"
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Keywords
Diamond-Like carbon (2)
DLC (2)
FFM (2)
PECVD (2)
Plasma enhanced vapor deposition (2)
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2006 (2)
Keywords
Diamond-Like carbon (2)
DLC (2)
FFM (2)
PECVD (2)
Plasma enhanced vapor deposition (2)
Ball-on disk (1)
BOD (1)
Friction force measurement (1)
Friction force microscope (1)
MEMS (1)
Micro electro mechanical system (1)
Thin film (1)
Tribology (1)
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"FFM"
A Study on Tribological Properties of Diamond-Like Carbon Thin Film for the Application to Solid Lubricant of MEMS Devices
J Electr Electron Mater
2006;19(11):1010-1013.
Published online November 1, 2006
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An Analysis of Tribological Properties of Metal Interlayered DLC Films Prepared by PECVD Method
J Electr Electron Mater
2006;19(7):631-635.
Published online July 1, 2006
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