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End point detection
WHERE t1.sid in(parameter_dbtbl_keyword '%End point detection%') and t1.xml_status <> 99
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DPS+poly chamber (1)
End point detection (1)
EPD time delay (1)
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WSix/poly-Si stack-down gate etching (1)
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DPS+poly chamber (1)
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"End point detection"
A Study for Stable End Point Detection in 90 nm WSix/poly-Si Stack-down Gate Etching Process
J Electr Electron Mater
2005;18(3):206-211.
Published online March 1, 2005
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