Skip to main navigation
Skip to main content
KIEEME
mobile search button
mobile menu button
Search
Advanced Search
ABOUT
ABOUT
Journal introduction
Aims and scope
Editorial board
Management team
Best practice
Subscription information
Contact us
BROWSE ARTICLES
All issues
Current issue
Most viewed
Most downloaded
Most cited
Search
Metrics
EDITORIAL POLICIES
Research ethics
Peer review policy
Copyright and open access policy
Article sharing policy
Archiving policy
Data sharing policy
Preprint policy
Crossmark policy
Advertising and sponsorship policy
Research misconduct-related regulations
FOR CONTRIBUTORS
Instructions for authors
Checklist
Copyright transfer agreement
Graphical abstract
E-SUBMISSION
Article Template
ABOUT
Journal introduction
Aims and scope
Editorial board
Management team
Best practice
Subscription information
Contact us
BROWSE ARTICLES
All issues
Current issue
Most viewed
Most downloaded
Most cited
Search
Metrics
EDITORIAL POLICIES
Research ethics
Peer review policy
Copyright and open access policy
Article sharing policy
Archiving policy
Data sharing policy
Preprint policy
Crossmark policy
Advertising and sponsorship policy
Research misconduct-related regulations
FOR CONTRIBUTORS
Instructions for authors
Checklist
Copyright transfer agreement
Graphical abstract
Page Path
HOME
Search
Dual poly gate
WHERE t1.sid in(parameter_dbtbl_keyword '%Dual poly gate%') and t1.xml_status <> 99
1
results for
"Dual poly gate"
Filter
Keywords
Decoupled plasma nitridation (1)
DPN (1)
Dual poly gate (1)
Radio frequency source power (1)
Publication year
2008 (1)
Authors
Chang Jib Kim (1)
Yong Han Roh (1)
Keywords
Decoupled plasma nitridation (1)
DPN (1)
Dual poly gate (1)
Radio frequency source power (1)
Cancel
Close
authors
Chang Jib Kim (1)
Yong Han Roh (1)
Cancel
Close
Publication Year
2008 (1)
Cancel
Close
Funded articles
Cancel
Close
"Dual poly gate"
Impact of DPN on Deep Nano-technology Device Employing Dual Poly Gate
Chang Jib Kim, Yong Han Roh
J Korean Inst Electr Electron Mater Eng
2008;21(4):296-299.
Published online April 1, 2008
DOI:
https://doi.org/10.4313/JKEM.2008.21.4.296
PDF
54
View
0
Download
First
Prev
Page
of 1
Next
Last
×
TOP
First
Prev
