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"Doubly clamped beam"

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"Doubly clamped beam"

Temperature Characteristics of Polycrystalline 3C-SiC Micro Resonators
Gwiy Sang Chung, Tae Won Lee
J Korean Inst Electr Electron Mater Eng 2009;22(4):314-317.   Published online April 1, 2009
DOI: https://doi.org/10.4313/JKEM.2009.22.4.314

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  • Silicon Carbide Thin Films for MEMS: Correlating Vapor-Phase Deposition Parameters with Material Properties and Device Performance
    Neeraj Yadav, Basit Abdul, Andrea Adami, Alvise Bagolini, Leandro Lorenzelli
    Applied Sciences.2026; 16(19): 9612.     CrossRef
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Fabrication of Polycrystalline SiC Doubly Clamped Beam Micro Resonators and Their Characteristics
Gwiy Sang Chung, Tae Won Lee
J Korean Inst Electr Electron Mater Eng 2009;22(4):303-306.   Published online April 1, 2009
DOI: https://doi.org/10.4313/JKEM.2009.22.4.303
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