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"Compound power devices"

Regular Paper : Semiconductor ; Optimal Design of GaN Power MOSFET Using Al2O3 Gate Oxide
Tae Jin Nam, Hun Suk Chung, Ey Goo Kang
J Korean Inst Electr Electron Mater Eng 2011;24(9):713-717.   Published online September 1, 2011
DOI: https://doi.org/10.4313/JKEM.2011.24.9.713
This paper was carried out design of 600 V GaN power MOSFET Modeling. We decided trench gate type one for design. we carried out device and process simulation with T-CAD tools. and then, we have extracted optimal device and process parameters for fabrication. we have analysis electrical characteristics after simulations. As results, we obtained 600 V breankdown voltage and 0.4 mΩcm2ultra low on resistance. At the same time, we carried out field ring simulation for obtaining high voltage.
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