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Cl2/CF4/Ar
WHERE t1.sid in(parameter_dbtbl_keyword '%Cl2/CF4/Ar%') and t1.xml_status <> 99
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"Cl2/CF4/Ar"
Etching Characteristics of Gold Thin Films using Inductively Coupled CF4/Cl2/Ar Plasma
Yun Seong Chang, Dong Pyo Kim, Chang Il Kim, Eui Goo Chang
J Korean Inst Electr Electron Mater Eng
2003;16(7):564-568.
Published online July 1, 2003
DOI:
https://doi.org/10.4313/JKEM.2003.16.7.564
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