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Cl2/Ar
WHERE t1.sid in(parameter_dbtbl_keyword '%Cl2/Ar%') and t1.xml_status <> 99
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"Cl2/Ar"
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Cl2/Ar (2)
ACP (1)
Al2O3 (1)
Au (1)
Dry etching (1)
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2009 (1)
2002 (1)
Authors
Chang Il Kim (2)
Yun Seong Chang (1)
Eui Goo Chang (1)
Dong Pyo Kim (1)
Gwan Ha Kim (1)
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Cl2/Ar (2)
ACP (1)
Al2O3 (1)
Au (1)
Dry etching (1)
Etching (1)
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Chang Il Kim (2)
Yun Seong Chang (1)
Eui Goo Chang (1)
Dong Pyo Kim (1)
Gwan Ha Kim (1)
Su Jae Lee (1)
Sang Hun Song (1)
Doo Seung Um (1)
Xue Yang (1)
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"Cl2/Ar"
Dry Etching of Al2O3 Thin Film by Cl2/Ar Plasma
Xue Yang, Doo Seung Um, Gwan Ha Kim, Sang Hun Song, Chang Il Kim
J Korean Inst Electr Electron Mater Eng
2009;22(12):1005-1008.
Published online December 1, 2009
DOI:
https://doi.org/10.4313/JKEM.2009.22.12.1005
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Etching Characteristics of Gold Thin Films using Inductively Coupled Cl2/Ar Plasma
Yun Seong Chang, Dong Pyo Kim, Chang Il Kim, Eui Goo Chang, Su Jae Lee
J Korean Inst Electr Electron Mater Eng
2002;15(12):1011-1015.
Published online December 1, 2002
DOI:
https://doi.org/10.4313/JKEM.2002.15.12.1011
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