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"Circular trench"

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"Circular trench"

An Analysis of IGBT (Insulator Gate Bipolar Transistor) Structure with an Additional Circular Trench Gate using wet Oxidation
Sang Hyeon Kwak, Sin Su Kyoung, Man Young Sung
J Korean Inst Electr Electron Mater Eng 2008;21(11):981-986.   Published online November 1, 2008
DOI: https://doi.org/10.4313/JKEM.2008.21.11.981
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