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Cesium assisted sputtering
WHERE t1.sid in(parameter_dbtbl_keyword '%Cesium assisted sputtering%') and t1.xml_status <> 99
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Tae Seon Kim (1)
Chul Hong Min (1)
Sung Jin Park (1)
Neung Goo Yoon (1)
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"Cesium assisted sputtering"
Modeling of Indium Tin Oxide(ITO) Film Deposition Process using Neural Network
Chul Hong Min, Sung Jin Park, Neung Goo Yoon, Tae Seon Kim
J Korean Inst Electr Electron Mater Eng
2009;22(9):741-746.
Published online September 1, 2009
DOI:
https://doi.org/10.4313/JKEM.2009.22.9.741
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