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"Cesium assisted sputtering"

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"Cesium assisted sputtering"

Modeling of Indium Tin Oxide(ITO) Film Deposition Process using Neural Network
Chul Hong Min, Sung Jin Park, Neung Goo Yoon, Tae Seon Kim
J Electr Electron Mater 2009;22(9):741-746.   Published online September 1, 2009
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