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Capacitive pressure sensors
WHERE t1.sid in(parameter_dbtbl_keyword '%Capacitive pressure sensors%') and t1.xml_status <> 99
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Kwang Ho Kim (1)
Sang Soo Noh (1)
Jeong Hwan Seo (1)
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"Capacitive pressure sensors"
Characteristics of Surface Micromachined Capacitive Pressure Sensors for High Temperature Applications
Jeong Hwan Seo, Sang Soo Noh, Kwang Ho Kim
J Electr Electron Mater
2010;23(4):317-322.
Published online April 1, 2010
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