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"CMOS technology"

The Dependency of Surface Damage to NiSi for CMOS Technology
Hee Hwan Ji, Soon Eui Ahn, Mi Suk Bae, Hun Jin Lee, Soon Young Oh, Hi Deok Lee, Jin Suk Wang
J Korean Inst Electr Electron Mater Eng 2003;16(4):280-285.   Published online April 1, 2003
DOI: https://doi.org/10.4313/JKEM.2003.16.4.280
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