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CHF3
WHERE t1.sid in(parameter_dbtbl_keyword '%CHF3%') and t1.xml_status <> 99
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Gwiy Sang Chung (1)
Soo Yong Chung (1)
Shigehiro Nishino (1)
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"CHF3"
Reactive Ion Etching Characteristics of 3C-SiC Grown on Si Wafers
Gwiy Sang Chung, Soo Yong Chung, Shigehiro Nishino
J Electr Electron Mater
2004;17(7):724-728.
Published online July 1, 2004
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