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"C4F8"

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"C4F8"

Improvement of Etch Rate and Profile by SF6, C4F8 and O2 Gas Modulation
Soon Il Kwon, Kea Joon Yang, Woo Chang Song, Dong Gun Lim
J Korean Inst Electr Electron Mater Eng 2008;21(4):305-310.   Published online April 1, 2008
DOI: https://doi.org/10.4313/JKEM.2008.21.4.305

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  • Hydrophobic Properties on RF-sputtered PTFE Films coated on UV-treated Glass Substrates
    Jin Woon Son, Hyon O Youn, Kang Bae, Sun Young Sohn, Hwa Min Kim
    Journal of Korean Institute of Electrical and Electronic Materials Engineers.2010; 23(1): 6.     CrossRef
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