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Ball-on disk
WHERE t1.sid in(parameter_dbtbl_keyword '%Ball-on disk%') and t1.xml_status <> 99
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"Ball-on disk"
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Ball-on disk (2)
BOD (2)
Diamond-Like carbon (2)
DLC (2)
MEMS (2)
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2006 (2)
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Ball-on disk (2)
BOD (2)
Diamond-Like carbon (2)
DLC (2)
MEMS (2)
Micro electro mechanical system (2)
PECVD (2)
Plasma enhanced vapor deposition (2)
FFM (1)
Friction force microscope (1)
Raman mapping method (1)
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"Ball-on disk"
A Study on Tribological Properties of Diamond-Like Carbon Thin Film for the Application to Solid Lubricant of MEMS Devices
J Korean Inst Electr Electron Mater Eng
2006;19(11):1010-1013.
Published online November 1, 2006
DOI:
https://doi.org/10.4313/JKEM.2006.19.11.1010
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A Study on Detailed Structural Variation of Diamond-Like Carbon Thin Film by a Novel Raman Mapping Method
J Korean Inst Electr Electron Mater Eng
2006;19(7):618-623.
Published online July 1, 2006
DOI:
https://doi.org/10.4313/JKEM.2006.19.7.618
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