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"BTMSM/O2"

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"BTMSM/O2"

Properties of SiOCH Thin Film Low Dielectric by BTMSM/O2 Flow Rates
In Cheol Park, Hong Bae Kim
J Electr Electron Mater 2009;22(2):132-136.   Published online February 1, 2009
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Properties of Dielectric Constant and Bonding Mode of Annealed SiOCH Thin Film
Jong Wook Kim, Chang Su Hwang, Yong Heon Park, Hong Bae Kim
J Electr Electron Mater 2009;22(1):47-52.   Published online January 1, 2009
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Properties of SiOCH Thin Film Bonding Mode by BTMSM/O2 Flow Rates
Jong Wook Kim, Chang Su Hwang, Hong Bae Kim
J Electr Electron Mater 2008;21(4):354-361.   Published online April 1, 2008
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