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Atomic torce microscopy
WHERE t1.sid in(parameter_dbtbl_keyword '%Atomic torce microscopy%') and t1.xml_status <> 99
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2-D simulation (1)
AFM (1)
Atomic torce microscopy (1)
Local oxidation (1)
Silicon carbide (1)
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2009 (1)
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Wook Bahng (1)
Yeong Deuk Jo (1)
Sang Cheol Kim (1)
Nam Kyun Kim (1)
Sang Mo Koo (1)
Keywords
2-D simulation (1)
AFM (1)
Atomic torce microscopy (1)
Local oxidation (1)
Silicon carbide (1)
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Wook Bahng (1)
Yeong Deuk Jo (1)
Sang Cheol Kim (1)
Nam Kyun Kim (1)
Sang Mo Koo (1)
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"Atomic torce microscopy"
Local Oxidation of 4H-SiC using an Atomic Force Microscopy
Yeong Deuk Jo, Wook Bahng, Sang Cheol Kim, Nam Kyun Kim, Sang Mo Koo
J Electr Electron Mater
2009;22(8):632-636.
Published online August 1, 2009
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