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ArF excimer laser(193 nm)
WHERE t1.sid in(parameter_dbtbl_keyword '%ArF excimer laser(193 nm)%') and t1.xml_status <> 99
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"ArF excimer laser(193 nm)"
Synthesis and Characterization of Novel Acid Amplifiers with a Low Absorbance at 193 nm
J Korean Inst Electr Electron Mater Eng
2004;17(8):806-811.
Published online August 1, 2004
DOI:
https://doi.org/10.4313/JKEM.2004.17.8.806
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