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Actuator die
WHERE t1.sid in(parameter_dbtbl_keyword '%Actuator die%') and t1.xml_status <> 99
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Jae Min Kim (1)
Seog Jin Yun (1)
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"Actuator die"
Fabrication and Characteristics of a Piezoelectric Valve for MEMS using a Multilayer Ceramic Actuator
Gwi Sang Jeong, Jae Min Kim, Seog Jin Yun
J Electr Electron Mater
2004;17(5):515-520.
Published online May 1, 2004
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