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300mm
WHERE t1.sid in(parameter_dbtbl_keyword '%300mm%') and t1.xml_status <> 99
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"300mm"
Improvement of Negative Bias Temperature Instability by Decoupled Plasma Nitridation Process
J Korean Inst Electr Electron Mater Eng
2005;18(10):883-890.
Published online October 1, 2005
DOI:
https://doi.org/10.4313/JKEM.2005.18.10.883
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