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"2-D simulation"

Local Oxidation of 4H-SiC using an Atomic Force Microscopy
Yeong Deuk Jo, Wook Bahng, Sang Cheol Kim, Nam Kyun Kim, Sang Mo Koo
J Korean Inst Electr Electron Mater Eng 2009;22(8):632-636.   Published online August 1, 2009
DOI: https://doi.org/10.4313/JKEM.2009.22.8.632
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