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Preparation and electrical properties of high dielectric ( Ba1-xSrx ) ( Ti-xZrx ) O3 thin film capacitors by sputtering technique

Jae Sun Kim, Soon Gil Yoon
J Electr Electron Mater 1999;12(10):869-872.
Published online: October 1, 1999
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Preparation and electrical properties of high dielectric ( Ba1-xSrx ) ( Ti-xZrx ) O3 thin film capacitors by sputtering technique
J Electr Electron Mater. 1999;12(10):869-872.   Published online October 1, 1999
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Preparation and electrical properties of high dielectric ( Ba1-xSrx ) ( Ti-xZrx ) O3 thin film capacitors by sputtering technique
J Electr Electron Mater. 1999;12(10):869-872.   Published online October 1, 1999
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