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PZT 강유전체 박막 캐패시터와 하부전극에 관한 연구

박영, 정세민, 문상일, 정규원, 김성훈, 송준태, 이준신

A Study on PZT Thin Film Capacitors and Their Bottom Electrodes

Young Park, Se Min Jung, Sang Il Moon, Kyu Won Chung, Sung Hoon Kim, Joon Tae Song, Jun Sin Lee
J Electr Electron Mater 1999;12(7):592-600.
Published online: July 1, 1999
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A Study on PZT Thin Film Capacitors and Their Bottom Electrodes
J Electr Electron Mater. 1999;12(7):592-600.   Published online July 1, 1999
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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A Study on PZT Thin Film Capacitors and Their Bottom Electrodes
J Electr Electron Mater. 1999;12(7):592-600.   Published online July 1, 1999
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