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센서 기능성 박막 : 초음파 열분해법을 이용한 ZnO 압전박막의 특성

이영진, 김학봉, 정진영, 이만형, 권혁채, 노용래

Properties of ZnO thin films by the ultrasonic spray pyrolysis technique

Young Jin Lee, Hak Bong Kim, Jin Young Jung, Man Hyeong Lee, Hyukchae Kwon, Yong Rae Roh
J Electr Electron Mater 1999;12(5):442-449.
Published online: May 1, 1999
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Properties of ZnO thin films by the ultrasonic spray pyrolysis technique
J Electr Electron Mater. 1999;12(5):442-449.   Published online May 1, 1999
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Properties of ZnO thin films by the ultrasonic spray pyrolysis technique
J Electr Electron Mater. 1999;12(5):442-449.   Published online May 1, 1999
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