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Deep 서브마이크론 LDD - nMOSFET 의 핫 - 캐리어 현상 억제를 위한 반경험적인 LDD 공정설계에 관한 연구

안태형, 김남훈, 김창일, 서용진, 장의구

A Study on Semi - Empirical LLD Process Design for Suppression of Hot - carrier Effects in Deep Submicron LDD - nMOSFETs

Tae Hyun An, Nam Hoon Kim, Chang Il Kim, Yong Jin Seo, Eui Goo Chang
J Electr Electron Mater 1999;12(3):193-199.
Published online: March 1, 1999
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A Study on Semi - Empirical LLD Process Design for Suppression of Hot - carrier Effects in Deep Submicron LDD - nMOSFETs
J Electr Electron Mater. 1999;12(3):193-199.   Published online March 1, 1999
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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A Study on Semi - Empirical LLD Process Design for Suppression of Hot - carrier Effects in Deep Submicron LDD - nMOSFETs
J Electr Electron Mater. 1999;12(3):193-199.   Published online March 1, 1999
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