Skip to main navigation Skip to main content
  • KIEEME

J Electr Electron Mater : Journal of Electrical and Electronic Materials

OPEN ACCESS
ABOUT
BROWSE ARTICLES
EDITORIAL POLICIES
FOR CONTRIBUTORS

Articles

전자 Swarm 법에 의한 SiH4 플라즈마의 전자이동속도 및 특성에너지 해석

이형윤, 백승권, 하성철

The Analysis of the Electron Drift Velocity and Characteristics Energy in SiH4 Plasma gas by Electron Swarm method

Hyoung Yoon Lee, Seung Kwon Paek, Sung Chung Ha
J Electr Electron Mater 1999;12(1):88-93.
Published online: January 1, 1999
  • 5 Views
  • 0 Download
  • 0 Crossref
  • 0 Scopus
prev next

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

Include:

The Analysis of the Electron Drift Velocity and Characteristics Energy in SiH4 Plasma gas by Electron Swarm method
J Electr Electron Mater. 1999;12(1):88-93.   Published online January 1, 1999
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
The Analysis of the Electron Drift Velocity and Characteristics Energy in SiH4 Plasma gas by Electron Swarm method
J Electr Electron Mater. 1999;12(1):88-93.   Published online January 1, 1999
Close