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MOD 법에 의해 제조된 NOx 가스용 반도체 박막센서의 특성

송수호, 송민석, 이재열

Characteristics of Semiconductor Thin Film NOx Sensor Fabricated by MOD Method

Soo Ho Song, Min Seok Song, Jai Yeoul Lee
J Electr Electron Mater 1998;11(11):1001-1006.
Published online: November 1, 1998
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Characteristics of Semiconductor Thin Film NOx Sensor Fabricated by MOD Method
J Electr Electron Mater. 1998;11(11):1001-1006.   Published online November 1, 1998
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Characteristics of Semiconductor Thin Film NOx Sensor Fabricated by MOD Method
J Electr Electron Mater. 1998;11(11):1001-1006.   Published online November 1, 1998
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