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RF 마그네트론 반응성 스퍼터링으로 제작된 ZnO / Glass 박막 특성

박용욱, 윤석진, 최지원, 김현재, 정형진, 박창엽

Characteristics of ZnO / Glass Thin Films Prepared by RF Magnetron Sputtering

Yong Wook Park, Seok Jin Yoon, Ji Won Choi, Hyun Jai Kim, Hyung Jin Jung, Chang Yub Park
J Electr Electron Mater 1998;11(10):833-841.
Published online: October 1, 1998
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Characteristics of ZnO / Glass Thin Films Prepared by RF Magnetron Sputtering
J Electr Electron Mater. 1998;11(10):833-841.   Published online October 1, 1998
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Characteristics of ZnO / Glass Thin Films Prepared by RF Magnetron Sputtering
J Electr Electron Mater. 1998;11(10):833-841.   Published online October 1, 1998
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