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2차 미분 Auger 스펙트럼을 이용한 ONO 초박막의 결합상태에 관한 연구

이상은, 윤성필, 김선주, 서광열

A Study on the Chemical State in the ONO Superthin Film by Second Derivative Auger Spectra

Sang Eun Lee, Sung Pil Yoon, Seon Ju Kim, Kwang Yell Seo
J Electr Electron Mater 1998;11(10):778-783.
Published online: October 1, 1998
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A Study on the Chemical State in the ONO Superthin Film by Second Derivative Auger Spectra
J Electr Electron Mater. 1998;11(10):778-783.   Published online October 1, 1998
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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A Study on the Chemical State in the ONO Superthin Film by Second Derivative Auger Spectra
J Electr Electron Mater. 1998;11(10):778-783.   Published online October 1, 1998
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